The Micro/Nano Fabrication Center was created in 2004 to be a flexible foundary, offering industrial space & facilities, industrial cleanroom space & facilities, device processing & characterization equipment. We have academic & industrial users working in the areas of semiconductors, bioengineering, MEMS, optics, and thermoelectrics. The Center has assisted companies with their feasibility studies, prototyping, product development, deferment of major capital expenses, and short courses.
Class 10 & 100 Cleanroom Space - We have 4000 sq. ft. of work area available in our Class 10 & Class 100 cleanroom, equipped with acid & solvent exhaust, easy access to power, nitrogen, DI water, drain to the neutralization system, and space for vacuum pumps in the immediate chase area.
Class 10,000 Space - Our Class 10,000 chase area of approximately 10,000 sq. ft. has access to acid & solvent exhaust, easy access to power, nitrogen, DI water, drain to the neutralization system, and space for vacuum pumps.
In-house High Capacity Ultra-pure Water - We can supply thousands of gallons of 18 Mohm ultra pure water to our users.
In-house Waste Treatment - We can neutralize wet bench waste streams without the need for users to collect their waste. This is a great feature allowing users to install and operate their own wet benches and processing equipment.