Nano Fabrication Center

The Nano Fabrication Center was created in 2004 and currently serves universities, government labs and private and public companies working in areas of semiconductors, bioengineering, MEMS, optics, and thermoelectrics. The Center is open and flexible, enabling researchers to endeavor in fabrication and enabling private enterprise to research, develop, prototype and produce their products.

The Cleanroom

The NFC houses 4000 sq. ft. of Class 10 & Class 100 cleanroom space, plus 10,000 sq. ft. of class 10,000 chase area.  The deionized water system can supply thousands of gallons of 18 M-ohm ultra-pure water and the in-house water treatment system can neutralize wet bench inorganic waste streams.