Equipment Rates

2024 External Rates - hourly unless specified otherwise.  For UA Internal rates, view the equipment page via iLab (Nano Fabrication Center)

Service External (non-UA)
Lithography Mask Aligner $85
YES Vapor Prime $33
Laurell Spin Coater $46
Parylene Coater $160
PVD Evaporation $95
PVD Sputtering $95
Oxidation/Anneal Furnace $85
Plasma Clean $51
Plasma Etch $82-$160
LPCVD Nitride Deposition $275
LPCVD Oxide Deposition $275
Atomic Layer Deposition $160
Dicing Diamond Saw $180
Wet Bench/Clean/Etch/Hood $110
Optical Profilometry $35
Profiler KLA Tencor P-15 $70
Reflectometry $35-$75
Four Point Probe $35-$85
UV-Vis-NIR $85
Scanning Raman Microscopy $100
Contact Angle Goniometer $85
X-Ray CT $350
Ellipsometry $100

If you have any questions please contact Facility Manager, Dr. Greg Book at book@email.arizona.edu