Semitool Spin Rinse Dryer (SRD)

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Semitool Spin Rinse Dryer

Located in our Class 100 cleanroom's lithography area, our double-stacked Semitool SRD will winse wafers to the required resistivity using ultra-pure water and dry wafers using hot UHP N2. The system is currently set up to handle both 100mm and 150mm wafers.

Operating Instructions