Skip to main content
The University of Arizona Wordmark Line Logo White
home home

Main navigation

  • Home
  • Overview NFC Staff NanoFab & Processing Facility (NF&P) Management Team
  • Center Overview Access Equipment Processing Services UA MFC Facilities Requirement Checklist
  • Safety Requirements MSDS Safety Training & Keys/Codes Emergency Response Guide Chemical Disclosure
  • Parking RLSS User Dashboard Useful Links Service Rates
  • Contact
  1. Home
  2. LPCVD System Manuals

LPCVD System Manuals

  1. M110_03 Safety

  2. M210_01 Operator

  3. M220_383_02 Process Manual

  4. M310_01 Load Station

  5. M320_01 Furnace

  6. M330_01 Gas Cabinet

  7. M340_01 Power Cabinet

  8. M410_01 DPC

  9. M420_10 DTC

  10. M430_02 ETC

  11. M440_01 Touchscreen

  12. M450_01 TSC

Arizona Nano Fabrication Center | Home

Site Login

We respectfully acknowledge the University of Arizona is on the land and territories of Indigenous peoples. Today, Arizona is home to 22 federally recognized tribes, with Tucson being home to the O’odham and the Yaqui. The University strives to build sustainable relationships with sovereign Native Nations and Indigenous communities through education offerings, partnerships, and community service.

University Information Security and Privacy

© 2025 The Arizona Board of Regents on behalf of The University of Arizona.