Skip to main content
The University of Arizona Wordmark Line Logo White
home home

Main navigation

  • Home
  • Overview NFC Staff NanoFab & Processing Facility (NF&P) Management Team
  • Center Overview Access Equipment Processing Services UA MFC Facilities Requirement Checklist
  • Safety Requirements MSDS Safety Training & Keys/Codes Emergency Response Guide Chemical Disclosure
  • Parking RLSS User Dashboard Useful Links Service Rates
  • Contact
  1. Home
  2. Facility
  3. Equipment List

Equipment List

Cleans
Eco-Snow
Spin Rinse Dryer (100mm - 150mm)
Spin Rinse Dryer (200mm)
Deposition
E-Beam Evaporator
Diener Parylene Coater
Thermal Evaporator
Nitride LPCVD
Poly Si LPCVD
LTO LPCVD
Oxidation/Anneal Furnace
Lesker AXXIS Sputter Deposition
Plasma Etch
Corial ICP-RIE Etcher
AGS RIE Etcher
Branson Plasma Asher
Lithography
Laurell Spin Coater
Madell Hotplate
Blanket Exposure
K.S. Mask Aligner
ABM Mask Aligner
UV Cure Station
Metrology / Inspection
Alpha Step
JA Woolam Ellipsometer
Agilent Cary UV/Vis/IR Spectrophotometer
Filmetrics F20 Film Transparent Film Measurement
Filmetrics 3D 
Goniometer
CDE Resmap
KLA-Tencor P15
Shimadzu CT X-Ray
Signatone Probe Station Microscope
HLT-160 Leak Detector
Horiba Raman and Spectroscope
Analytical Balance
Packaging
Wafer Saw
Die Attach
Wedge Bonder
Wet Benches & Hoods
Wet Bench & Hood (Litho Area)
Solvent Hood (Litho Area)
Wet Bench & Hood (Chase Area)
Wet Bench (Chase Area)
DI Water Production
Waste Neutralization
UHP LN2/N2
Support Equipment
Gas Abatement Canister
Mettler Scale
Nikon Microscope
Omax Microscope
LP-III Vapor Prime Oven
BOC Drystar Pump
Midas Gas Detector
Wastewater Treatment Facility
GasGuard 450 Process Gas Controller

 

Facility

  • Center Overview
  • Access
  • Equipment
    • Gas Connection Assignment Table
  • Processing Services
  • UA MFC Facilities Requirement Checklist
Arizona Nano Fabrication Center | Home

Site Login



We respectfully acknowledge the University of Arizona is on the land and territories of Indigenous peoples. Today, Arizona is home to 22 federally recognized tribes, with Tucson being home to the O’odham and the Yaqui. The University strives to build sustainable relationships with sovereign Native Nations and Indigenous communities through education offerings, partnerships, and community service.


University Information Security and Privacy

© 2025 The Arizona Board of Regents on behalf of The University of Arizona.